Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã
Direct Write
500Å to 300µm
Pieces need a carrier wafer; Isotropic Etching
Resist as mask allowed
Two programs: Singe and HMDS prime or Singe only. No Resist allowed!
Manual solvent cleaning, two ultrasonic baths.
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C, programmable.
Manual solvent cleaning, hot plate
Convection in N2. Cure. Programmable.
