Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Location
Wafer Prime (HMDS), Singe HMDS Vapor Prime Oven, YES
yes

YES oven: Wafer singe at 150ºC and HMDS prime.

 "All" SNF Paul G Allen L107 Cleanroom
Wafer Prime (HMDS) HMDS Vapor Prime Oven, YES2
yes2

YES2 oven: HMDS prime at 150ºC

 "All" SNF Exfab Paul G Allen 104 Stinson