These are the gases provided for lab users. If you would like to use other gases, please consult the PROM Committee. Air (78% N2, 21% O2, ~1% Ar) Ammonia (NH3) Argon (Ar) Arsine (AsH3) B3H6 (B3H6) Boron trichloride (BCl3) Chlorine (Cl2) Chlorodifluoromethane (CHClF2) Diborane (B2H6) DCS (H2SiCl2) Ethanol vapor (C2H5OH) Fluoroform (CHF3) Forming gas 4% (4% H2 in N2) Germane (GeH4) He/O2 (80% He/ 20%O2) Helium (He) HF vapor (HF vapor) Hydrogen (H2) Hydrogen 10% in Nitrogen (10% H2 in N2) Hydrogen Bromide (HBr) Methane (CH4) MO sources (MO sources) Nitrogen (N2) Nitrogen trifluoride (NF3) Nitrous (N2O) Oxygen (O2) Perfluorocyclobutane (C4F8) Perfluoroethane (C2F6) Phosphine (PH3) Silane (SiH4) Silane 2% in Nitrogen (2% SiH4 in N2) Silane 5% in He (5% SiH4 in He) Silicon Germanium (SiGe) Sulfur Hexafluoride (SF6) Tetraethyl Orthosilicate (Si(OC2H5)4) Tetrafluoromethane (CF4) Xenon Difluoride (XeF2)
