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Stanford Nanofabrication Facility
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Characterization (link to Processing Techniques)
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Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Techniques
Overview
Processing Techniques
Projects
Fab Project Courses: E241 & EE412
Community Service Projects
nano@stanford Fellowship Projects
Nano Nuggets
Processes
Device Process Courses: EE410 and EE312
Runsheets
Processes
List of Processes
Dry Etching: Attaching Samples to Carrier Wafers for Dry Etching or Deposition
Dry Resist Stripping, Descum and Polymer Removal Processes, Link to Processing Technique Dry Etching
Photoresist Stripping Options vs. Cleanliness Level, Link to Processing Technique Resist Removal
Tweezers Cleaning
Wet Cleaning: Standard Pre-Diffusion Clean for Oxidation (SC1/HF dip/SC2) of Non-Metal Wafers (clean)
Wet Cleaning: Standard Pre-LPCVD or Pre-Metal Clean’ for LPCVD or Metal Deposition (SC1/SC2/HF dip) of Non-Metal Wafers (clean)
Last modified:
25 Mar 2025
