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Function and Method(s)

Function and Method(s): 
Pre-LPCVD or Pre-Metal Clean

Equipment Used

Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)

Wet Cleaning: Standard Pre-LPCVD or Pre-Metal Clean’ for LPCVD or Metal Deposition (SC1/SC2/HF dip) of Non-Metal Wafers (clean)

Source: 
‘Standard Pre-LPCVD or Pre-Metal Clean’ for LPCVD or Metal Deposition (SC1/SC2/HF dip) of Non-Metal Wafers (clean)
Trouble with permissions to access the document below? Email the SNF Web Crew with the URL of this page & the document name!

‘Standard Pre-LPCVD or Pre-Metal Clean’ for LPCVD or Metal Deposition (SC1/SC2/HF dip) of Non-Metal Wafers (clean)

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