This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
SU-8 50 on quartz wafers 09/29/2025 (all day)

SU-8 50 on quartz wafers. Only allowed to spin on Laurell-R and expose on KS.

Karl Suss MA-6 Contact Aligner (karlsuss),
Karl Suss MA-6 Contact Aligner (karlsuss2),
Laurell Manual Resist Spinner (laurell-R)
Approved for all users.
Personal LOR 30B Bottle 09/09/2025 (all day)

Use thick LOR 30B for delicate 3D structures printed on the Nanoscribe.

Nanoscribe Photonics GT (nanoscribe) Approved
Personal LOR 15B Bottle 08/28/2025 (all day)

Personal bottle of LOR 15B.

Oven (White) (white-oven),
Heidelberg MLA 150 (heidelberg),
Karl Suss MA-6 Contact Aligner (karlsuss)
Approved for all users.
Personal LOR 5A Bottle 08/19/2025 (all day)

Personal LOR 5A Bottle

Approved for all users.
Use of Lift Off Resist PMGI SF9 12/15/2021 (all day) Request for personal LOR in SNF. Request approved. Please see process staff for details.
Nitric Acid Wet Etching for Selective Removal of Ag from Ag-Au alloys 12/14/2021 (all day) Request for new process. Request approved.
Perovskite etching of BTO, STO, and KTO 12/14/2021 (all day) Etch of BTO, STO, and KTO perovskites in MRC. Request approved for MRC only.
Diazonium use in Mavericks 12/14/2021 (all day) Chemical process to be performed in Mavericks. Request approved. Please see process staff for details.
Etching of BTO and STO in MRC etcher 12/14/2021 (all day) Etch of BTO and STO in MRC. Request approved. Please see process staff for details.
Perminex 1000 Series 12/14/2021 (all day) Use of SU-8 like personal chemical in SNF. Request approved. Please see process staff for details.

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