This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| SU-8 50 on quartz wafers | 09/29/2025 (all day) |
SU-8 50 on quartz wafers. Only allowed to spin on Laurell-R and expose on KS. |
Karl Suss MA-6 Contact Aligner (karlsuss), Karl Suss MA-6 Contact Aligner (karlsuss2), Laurell Manual Resist Spinner (laurell-R) |
Approved for all users. |
| Personal LOR 30B Bottle | 09/09/2025 (all day) |
Use thick LOR 30B for delicate 3D structures printed on the Nanoscribe. |
Nanoscribe Photonics GT (nanoscribe) | Approved |
| Personal LOR 15B Bottle | 08/28/2025 (all day) |
Personal bottle of LOR 15B. |
Oven (White) (white-oven), Heidelberg MLA 150 (heidelberg), Karl Suss MA-6 Contact Aligner (karlsuss) |
Approved for all users. |
| Personal LOR 5A Bottle | 08/19/2025 (all day) |
Personal LOR 5A Bottle |
Approved for all users. | |
| Use of Lift Off Resist PMGI SF9 | 12/15/2021 (all day) | Request for personal LOR in SNF. | Request approved. Please see process staff for details. | |
| Nitric Acid Wet Etching for Selective Removal of Ag from Ag-Au alloys | 12/14/2021 (all day) | Request for new process. | Request approved. | |
| Perovskite etching of BTO, STO, and KTO | 12/14/2021 (all day) | Etch of BTO, STO, and KTO perovskites in MRC. | Request approved for MRC only. | |
| Diazonium use in Mavericks | 12/14/2021 (all day) | Chemical process to be performed in Mavericks. | Request approved. Please see process staff for details. | |
| Etching of BTO and STO in MRC etcher | 12/14/2021 (all day) | Etch of BTO and STO in MRC. | Request approved. Please see process staff for details. | |
| Perminex 1000 Series | 12/14/2021 (all day) | Use of SU-8 like personal chemical in SNF. | Request approved. Please see process staff for details. |