This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Use of Li7La3Zr2O12 in Savannah and MVD | 11/20/2020 (all day) | Request to use air sensitive and non-standard substrate in MVD. | MVD (mvd) | Request approved. |
| Use of CoCl2 in Laurell-g | 11/20/2020 (all day) | Request to use salts in spinner outside of cleanroom (laurell-g) | Request approved. Please see process staff for details. | |
| GE Varnish for non-galvanic flip chip bonding | 11/19/2020 (all day) | Modified PROM request to use GE Varnish instead of Indium for bonding in flip chip bonder. | Finetech Lambda (flipchipbonder) | Request approved. |
| Spincoating and dry etching of PEDOT-PSS | 11/18/2020 (all day) | Request to bring in liquid form PEDOT-PSS to spin coat and etch in SNF |
Headway Manual Resist Spinner (headway2), Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox), Wet Bench Miscellaneous (wbmiscres) |
Request approved. |
| Use of Color Resist CT3050 | 11/09/2020 (all day) | Request for new resist in SNF labs. | Request approved. Please see process staff for details. | |
| Request to expose pre-coated ZC100 in ExFab | 11/05/2020 (all day) | Request to use ExFab equipment for lithography exposure only. | Request approved. Please see process staff for details. | |
| EKC-265 Storage and Use Protocol | 10/20/2020 (all day) | Protocol for EKC 265 use is documented and acknowledged by user. | Request approved. Please see process staff for details. | |
| Request for personal Black Resin for Form2 | 09/14/2020 (all day) | Request to bring in and store personal black resin supply in Mavericks to use on Form2. | Fumehood 1 (fumehood1) | Request approved. |
| Request to use Color Resist SK-7000 in SNF | 09/14/2020 (all day) | Request for new resist in SNF labs. | Request approved. Please see process staff for details. | |
| Request to use Color Resist SY-7000 in SNF | 09/14/2020 (all day) | Request for new resist in SNF labs. | Request approved. Please see process staff for details. |