ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| DuPont Polyimide FDLP C210 on headway2, Micromist coater, and Blue M Oven | 03/11/2020 | New PI for use in the cleanroom. |
Oven BlueM 200°C to 430°C (bluem), Headway Manual Resist Spinner (headway2) |
Request approved. Please see process staff for details. |
| NuSiL MED 6019 and MED 4924 and MED 4950 in Mavericks | 03/10/2020 | Use of new materials in Mavericks. | Wet Bench Miscellaneous (wbmiscres) | Request approved. |
| Ion gel encapsulation in MVD | 03/06/2020 | Introduction of an ion gel material into MVD | MVD (mvd) | Request approved. |
| Bring Titanium Etchant TFTN to use in SNF | 02/26/2020 | Use of new chemistry for Ti Etch in SNF. | Request approved. Please see process staff for details. | |
| 2020026 Bring Titanium Etchant TFTN to use in SNF | 02/26/2020 | Use of new chemistry for Ti Etch in SNF. | Approved. | |
| InSe into SNF | 02/24/2020 | Request to bring new 2D material for processing in specific SNF tools. |
Headway Manual Resist Spinner (headway2), Heidelberg MLA 150 - 2 (heidelberg2), AJA Evaporator (aja-evap) |
Request approved with local waste collection. |
| Use of Micro Chem SU8 | 02/19/2020 | Request to bring in SU-8 (not stocked by SNF). | Request approved. Please see process staff for details. | |
| Use of TMSB in SNF | 02/14/2020 | Request to aerosolize Silver in Mister Mister in SNF. | Request withdrawn. Please see process staff for details. | |
| Wet Etch of BTO Thin Film Using BOE+HNO3+DI | 02/10/2020 | Request to do a chemical process similar to HNA in the SNF. | Request approved. Please see process staff for details. | |
| Request to use Ostemer 324 and 322 in Mavericks 155 | 02/07/2020 | Request to bring in Crystal Clear Chemistries for use in 155. | Request approved. Please see process staff for details. |
