This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| SnO2 target for use in ExFab Lesker | 03/13/2020 (all day) | New target for use in SNF (ExFab) Lesker | Lesker Sputter (lesker-sputter) | Approved. |
| Thick ALD Titania in Savannah | 03/12/2020 (all day) | Request to deposit thicker than maximum allowed TiO2 layer | Savannah ALD (savannah) | Approved. |
| Use of NR26-1200PY in SNF | 03/12/2020 (all day) | Requst to bring new negative photoresist into SNF |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Wet Bench Miscellaneous (wbmiscres) |
Approved. |
| DuPont Polyimide FDLP C210 on headway2, Micromist coater, and Blue M Oven | 03/11/2020 (all day) | New PI for use in the cleanroom. |
Oven BlueM 200°C to 430°C (bluem), Headway Manual Resist Spinner (headway2) |
Request approved. Please see process staff for details. |
| Use of Parylene D in parcoater | 03/11/2020 (all day) | Use of a new Parylene in Mavericks | PDS 2010 LABCOTER™ 2 Parylene Deposition System (parcoater) | Request approved. Please see process staff for details. |
| NuSiL MED 6019 and MED 4924 and MED 4950 in Mavericks | 03/10/2020 (all day) | Use of new materials in Mavericks. | Wet Bench Miscellaneous (wbmiscres) | Request approved. |
| Ion gel encapsulation in MVD | 03/06/2020 (all day) | Introduction of an ion gel material into MVD | MVD (mvd) | Request approved. |
| Bring Titanium Etchant TFTN to use in SNF | 02/26/2020 (all day) | Use of new chemistry for Ti Etch in SNF. | Request approved. Please see process staff for details. | |
| 2020026 Bring Titanium Etchant TFTN to use in SNF | 02/26/2020 (all day) | Use of new chemistry for Ti Etch in SNF. | Approved. | |
| InSe into SNF | 02/24/2020 (all day) | Request to bring new 2D material for processing in specific SNF tools. |
Headway Manual Resist Spinner (headway2), Heidelberg MLA 150 - 2 (heidelberg2), AJA Evaporator (aja-evap) |
Request approved with local waste collection. |