ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Soliip Flex9H Coating in SNF | 07/27/2020 | Request for new chemical use in SNF. | Request approved. Please see process staff for details. | |
| Flex9H PRM 2150 Coating | 07/27/2020 | Request for new chemical use in SNF. | Request approved. Please see process staff for details. | |
| Request to use QDPR in SNF Labs | 07/23/2020 | Request to use Quantum Dot photoreseist in SNF | Approved for use in wafersaw room Laurell. Please see process staff for details. | |
| Au and Ag Nanocluster- PETA polymer resin for Nanoscribe | 07/23/2020 | New polymer resin to use with Nanoscribe | Approved. | |
| Ce(iPrCp)3 for CeO2 ALD | 07/09/2020 | Request to bring new precursor in for use in Fiji3 | Fiji 3 ALD (fiji3) | Approved. |
| Request to use SU-8 2100 in SNF | 06/20/2020 | Request to bring in personal SU8 supply |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss) |
Approved. |
| SnO2 target for use in ExFab Lesker | 03/13/2020 | New target for use in SNF (ExFab) Lesker | Lesker Sputter (lesker-sputter) | Approved. |
| Use of NR26-1200PY in SNF | 03/12/2020 | Requst to bring new negative photoresist into SNF |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Wet Bench Miscellaneous (wbmiscres) |
Approved. |
| Thick ALD Titania in Savannah | 03/12/2020 | Request to deposit thicker than maximum allowed TiO2 layer | Savannah ALD (savannah) | Approved. |
| Use of Parylene D in parcoater | 03/11/2020 | Use of a new Parylene in Mavericks | PDS 2010 LABCOTER™ 2 Parylene Deposition System (parcoater) | Request approved. Please see process staff for details. |
