This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
Microchem Remover PG 12/12/2013 (all day) Inquiry to store new 4L bottle of Microchem Remover PG Approved. Mahnaz provided yellow label for bottle.
MgO Substrate in Fiji2 12/12/2013 (all day) Request to use MgO substrate in Fiji2 Fiji 2 ALD (fiji2),
Woollam (woollam)
Approved.
EE342 Piezoelectric AlN/Mo stack 12/06/2013 (all day) Documentation of EE342 process No approval required. Form submitted for documentation purposes.
Potassium Dichromate (K2Cr2O7) Solution 12/04/2013 (all day) Request to bring in Potassium Dichromate (K2Cr2O7) chemistry Wet Bench Flexcorr 1 (wbflexcorr-1) Approved.
PCB and Ceramic Adhesive 12/04/2013 (all day) Request to process Printed Circuit Board and ceramic adhesive in Fiji2 Fiji 2 ALD (fiji2) Approved. Samples require vacuum bake prior to ALD.
Epoxy Permanent Resist version 168 11/21/2013 (all day) Request to bring in MicroChem Epoxy Permanent Resist v. 168 Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information.
Epoxy Permanent Resist version 167 11/21/2013 (all day) Request to bring in MicroChem Epoxy Permanent Resist v. 167 Approved.
CdS in Fiji2 11/08/2013 (all day) Request to bring in CdS pieces to process in Fiji2 Fiji 2 ALD (fiji2) Approved with special handling requirements.
BiVO4 in Fiji2 10/24/2013 (all day) Request to bring in BiVO4 films to process in Fiji2 Fiji 2 ALD (fiji2) Approved. Committee notification required if BiVO4 preparation procedures change.
Use of Santovac5 for thermal contact in Plasma Etch (gold systems) 09/18/2013 (all day) Experiments performed to identify feasibility of Santovac5 for thermal contact in gold plasma etchers. MRC Reactive Ion Etcher (mrc) Recommendations for use included in PROM form.

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