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ProM Request archive

This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
Use of Aquapel in SNF 05/15/2015 Request to use Aquapel in SNF. Wet Bench Miscellaneous (wbmiscres) Request approved.
Ge2Sb2Te6 Sputter Target for Metallica 04/23/2015 Request for new GST target to be used on Metallica. Request approved.
Use of AZ Siloxane Negative Tone Resist 04/14/2015 Request to use AZ Siloxane S06.106 negative tone resist. Request approved. Bottle inventory for the group will be managed to 7 bottles. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information.
Al2O3 ALD on TMD in MVD Savannah 04/13/2015 Request to do Al2O3 capping of exoliated TMD structures in an inert environment. Request approved.
OSCoR SL Stripper 200 04/03/2015 Request to use Stripper 200 and supporting chemicals in order to enable processing on organic electronic materials. Request approved.
Lampoly HBr/Cl2/O2 etching of silicon on lithium niobate 03/30/2015 Request to etch Si on lithium niobate substrate. Contamination plan documented. Lam Research TCP 9400 Poly Etcher (lampoly) Request approved. Data to be reviewed by PROM committee.
Use of AZ 125nxt photoresist 03/25/2015 Request to use AZ 125nxt resist in headway, karl suss, and SVG dev. Headway Manual Resist Spinner (headway2),
Karl Suss MA-6 Contact Aligner (karlsuss),
SVG Develop Track 1 (svgdev)
Request approved.
AZ1518 Photoresist and AZ300MIF Developer in SNF 03/23/2015 Request to bring new AZ1518 resist and corresponding AZ300MIF developer. Request approved.
Wafers from outside fab to process in SNF clean tools 03/19/2015 Data submission as per SNF contamination policy. Wet Bench Clean 1 (wbclean-1),
Fiji 1 ALD (fiji1)
Request approved.
Process flow for etching Silicon Germanium on contaminated wafers with aluminum in LAMpoly (clean) 03/16/2015 Request to modify contamination policy and allow contaminated wafers on clean etcher. Lam Research TCP 9400 Poly Etcher (lampoly) Request approved for data collection. Data will be reviewed by PROM committee.

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