ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| MasterBond UV15LV | 06/23/2015 | Request to use MasterBond UV15LV in Laurell in wafer saw room. | Request approved. | |
| Hot wet etch for SiC | 06/20/2015 | Request to use hot HF:HNO3 solution to etch silicon carbide. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Request rejected due to safety concerns. |
| Request to use Langatate material in the SNF | 06/19/2015 | Request to bring in new material (Langatate) and develop HSQ bonding procedure. | Headway Manual Resist Spinner (headway2) | Request approved. |
| ALD on thermally reduced graphene oxide in Fiji2 | 06/09/2015 | Request to bring graphene oxide on diamond wafers into SNF for processing on Fiji2. |
Fiji 2 ALD (fiji2), PlasmaTherm Shuttlelock PECVD System (ccp-dep) |
Request approved. |
| Request to spin Teflon on Headway | 06/09/2015 | Request to spin Teflon on Headway. | Headway Manual Resist Spinner (headway2) | Request approved. |
| Nafion dispersion D1021 in SNF | 06/09/2015 | Request to bring Nafion D1021 into SNF to coat in Metallica and etch in Drytek2. Nafion to be dipsersed outside of SNF. |
SVG Resist Coat Track 1 (svgcoat), Karl Suss MA-6 Contact Aligner (karlsuss) |
Request approved. Requestors will work with Usha to develop etch recipe. |
| Hybrid nanocomposite synthesis with polyimides | 06/02/2015 | Request to bring new polyimide materials into the SNF. |
Savannah ALD (savannah), Fiji 2 ALD (fiji2), Headway Manual Resist Spinner (headway2) |
Request approved. |
| Processing of Thulium Doped Structures | 05/27/2015 | Request to use wafers with Thulium doping in litho, etch, and cleans. Contamination evaluation plan documented. |
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL), Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox) |
Request approved. VPD ICPMS results to be reviewed by the PROM Committee. |
| Request to deposit amorphous TiO2 on SrTiO3 and LiNbO3 substrates in Inlvac-spt | 05/20/2015 | Request to do new film development on Intlvac-spt using new substrates (SrTiO3 and LiNbO3) | Request approved. Purchase and use of dedicated wafer holder required. | |
| Cyclotene XUS Replenishment | 05/18/2015 | Request to bring in new bottle of Cyclotene XUS. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information |
