Request to deposit amorphous TiO2 on SrTiO3 and LiNbO3 substrates in Inlvac-spt
PROM Request Title:
Request to deposit amorphous TiO2 on SrTiO3 and LiNbO3 substrates in Inlvac-spt
PROM Request Summary:
Request to do new film development on Intlvac-spt using new substrates (SrTiO3 and LiNbO3)
PROM Date:
05/20/2015
PROM Decision:
Request approved. Purchase and use of dedicated wafer holder required.
Link to PROM Request and supporting documentation:
