This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| New SrO ALD precursor | 11/19/2015 (all day) | Request to use new experimental BASF SrO ALD precursor in Fiji2. |
Fiji 2 ALD (fiji2), Woollam (woollam) |
Request approved. |
| Use of Toray DL1000C | 11/16/2015 (all day) | Request to use DL-1000C color resist in SNF. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information | |
| Use of unopened old wafers (circa 2009) | 11/11/2015 (all day) | Request to use old 1K ox wafers in gold contaminated toolset. | Request approved. | |
| Etching of contaminated wafer pieces in Lampoly | 09/30/2015 (all day) | Request to use Lampoly to etch straight profiles into contaminated wafer pieces. |
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE), Lam Research TCP 9400 Poly Etcher (lampoly) |
Request approved with ICPMS contamination collection. |
| Modified Process on STS | 09/23/2015 (all day) | Use STS to generate Ni catalyst balls from thin film. | Request approved. No equipment modifications will be allowed. | |
| FFEM LCD Resist and Developer for Lithography | 09/23/2015 (all day) | Use of SK6000 resist and CD-2060 developer and storage of chemicals for 2 weeks. | Headway Manual Resist Spinner (headway2) | Request approved. |
| Microchem PRL for Lithography | 09/23/2015 (all day) | Use of Microchem PRL and storage of chemical for 2 weeks. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Oven (White) (white-oven) |
Request approved. |
| Toray Light Shielding Material for Lithography | 09/23/2015 (all day) | Use of TABK-5000 and storage of chemical for 2 weeks. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Oven (White) (white-oven) |
Request approved. |
| Use of SB-5000L | 09/14/2015 (all day) | Request to use SB-5000L Color Resist in SNF. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information | |
| CMP of PbS | 09/14/2015 (all day) | Request to use CMP to polish PbS film. | CMP GnP POLI-400L (cmp) | Request approved. |