PROM Request Title: 
LixAlyOz ALD
PROM Request Summary: 
Request to make Lithium-Aluminum-Oxide in Savannah.
PROM Date: 
09/03/2015 (all day)
PROM Decision: 
Request approved. Savannah chamber will need to be sent for cleaning after processing.
Link to PROM Request and supporting documentation: 
LixAlyOz ALD
Equipment List: 
Savannah ALD (savannah)
Woollam (woollam)