Overview
Savannah is a thermal atomic layer deposition (ALD) system. It is a Savannah S200 from Cambridge Nanotech and is categorized in the flexible cleanliness category. There is a policy in place to allow semiclean processing on Savannah with additional precautions. The system can accommodate pieces up to an 8" wafer.
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
Material Thickness Range:
Process Temperature Range:
Gases
Substrate Type
Substrate Sizes
Lab Organization, Location, and NEMO Information
Training and Maintenance
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
- Study the relevant operating procedures:
Shadow labmembers who are using the Savannah. Make sure to ask a lot of questions during the shadowing session so you become comfortable with the tool and the procedures the SNF uses.
When you are ready to run the tool on your own, please contact the primary trainer to schedule a written quiz.
After you have successfully completed the written quiz, you can schedule the practical in-lab hands on final training session with the primary trainer.