Savannah ALD (savannah)
Overview
Savannah is a thermal atomic layer deposition (ALD) system. It is a Savannah S200 from Cambridge Nanotech and is categorized in the flexible cleanliness category. There is a policy in place to allow semiclean processing on Savannah with additional precautions. The system can accommodate pieces up to an 8" wafer.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
Material Thickness Range: 1.0 Å - 50.0 nm
Process Temperature Range:
24 °C - 250 °C
Gases
Substrate Type
Substrate Sizes
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
SNF: Chemical Vapor Deposition
NEMO ID:
savannah
Training and Maintenance
Lab Facility:
Training Charges:
1.50 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadow labmembers who are using the Savannah. Make sure to ask a lot of questions during the shadowing session so you become comfortable with the tool and the procedures the SNF uses.
- When you are ready to run the tool on your own, please contact the primary trainer to schedule a written quiz.
- After you have successfully completed the written quiz, you can schedule the practical in-lab hands on final training session with the primary trainer.
