Skip to content Skip to navigation

Savannah ALD (savannah)


photo of Savannah in SNF cleanroom

Savannah is a thermal atomic layer deposition (ALD) system. It is a Savannah S200 from Cambridge Nanotech and is categorized in the flexible cleanliness category. There is a policy in place to allow semiclean processing on Savannah with additional precautions. The system can accommodate pieces up to an 8" wafer.


Lab Organization, Location, and NEMO Information

NEMO Area: 
SNF: Chemical Vapor Deposition

Training and Maintenance

photo of Savannah in SNF cleanroom
Lab Facility: 
Training Charges: 
1.50 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadow labmembers who are using the Savannah. Make sure to ask a lot of questions during the shadowing session so you become comfortable with the tool and the procedures the SNF uses. 
  3. When you are ready to run the tool on your own, please contact the primary trainer to schedule a written quiz.
  4. After you have successfully completed the written quiz, you can schedule the practical in-lab hands on final training session with the primary trainer.

Operating Instructions