Al2O3 ALD on TMD in MVD Savannah
PROM Request Title:
Al2O3 ALD on TMD in MVD Savannah
PROM Request Summary:
Request to do Al2O3 capping of exoliated TMD structures in an inert environment.
PROM Date:
04/13/2015
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
