Equipment name & NEMO ID | Technique | Cleanliness | Material Thickness Range | Materials Lab Supplied | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Resist | Process Temperature Range | Chemicals | Gases | Sample Size Limits | Resolution Notes | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Aixtron MOCVD - III-N system aix-ccs |
Clean (MOCVD) |
0.00 -
5.00 μm
|
400 °C - 1300 °C
|
, , , |
4"x1, 2"X3, pieces | ||||||||||||
AJA Evaporator aja-evap |
Flexible |
0.00 -
300.00 nm
|
, , , , , , , , , , , |
4"x3 or 6"x1 wafers or pieces | |||||||||||||
AJA2 Evaporator aja2-evap |
Flexible |
0.00 -
300.00 nm
|
, , , , , |
4"x3 or 6"x1 wafers or pieces | |||||||||||||
ASML PAS 5500/60 i-line Stepper asml |
All |
|
365 nm | 5 inch |
, , , , |
||||||||||||
CHA Solutions II Evaporator cha-evap |
Flexible |
0.00 -
300.00 nm
|
, , , , , |
4"x15 or 6"x3 wafers or pieces | |||||||||||||
Critical Point Dryer Tousimis Automegasamdri-936 cpd |
Flexible |
, , , , , , , , , |
|||||||||||||||
DISCO Wafer Saw DISCO wafersaw |
Flexible |
, , , , , , , |
1x4", 1x6" or 1x8" wafer, or pieces | ||||||||||||||
EVG 101 Spray Coater evgspraycoat |
All |
, , , , |
1 | ||||||||||||||
EVG Contact Aligner evalign |
All |
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
, , , , |
one piece or wafer | ||||||||||
Fiji 2 ALD fiji2 |
Flexible |
1.00 Å -
50.00 nm
|
24 °C - 350 °C
|
, , , , , , , , , , , , |
|||||||||||||
Finetech Lambda flipchipbonder |
Flexible |
°C - 400 °C
|
, , , , , |
1 | |||||||||||||
Flexus 2320 Stress Tester stresstest |
All |
, , , , , , , , |
1 | ||||||||||||||
Headway Manual Resist Spinner headway2 |
All |
, , , , , , , , , |
one piece or wafer | ||||||||||||||
Heidelberg MLA 150 heidelberg |
All |
|
405 nm |
, , , , , , , , , , , , |
1 | ||||||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
|
375 nm |
, , , , , , , , , , , , |
1 | ||||||||||||
HMDS Vapor Prime Oven, YES yes |
All |
150 ºC
|
, , , , , , , , |
||||||||||||||
Karl Suss MA-6 Contact Aligner karlsuss |
All |
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
, , , , , , , , , |
|||||||||||
Karl Suss MA-6 Contact Aligner karlsuss2 |
All |
|
365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
, , , , , , , , , |
|||||||||||
Keyence Digital Microscope VHX-6000 keyence |
All |
, , , , , , , , |
|||||||||||||||
Lakeshore Hall Measurement System LakeshoreHall |
All |
100.00 μm -
1000.00 μm
|
-258 °C - 1000 °C
|
8 in wafer |
Sensor Transducer Size is 14 mm diameter |
, , , , , , , , , , |
1 piece |