AJA2 Evaporator (aja2-evap)
Overview
This AJA e-beam evaporator is used to directionally deposit various metals (Ti, Au, Cr, Al, Ni, Pt, Pd, Ag, Cu, etc..). Deposition rate is PID controlled, with automatic shutter closure at the defined end thickness. This tool also has an integrated Ar ion mill, which can be used to clean substrate surface prior to deposition. Accomodates up to three 4" wafers, one 6" wafer, or wafer pieces, which are transferred into the chamber via a load lock. SNF staff try to minimize target changes on this tool, so please direct non-standard deposition metal requests to the first AJA. Oxide deposition is not allowed in this tool. An up-to-date list of loaded deposition targets is maintained on NEMO.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
Material Thickness Range: 0.0 - 300.0 nm
Substrate Type
Substrate Sizes
Maximum Load:
4"x3 or 6"x1 wafers or pieces
Notes:
For more than 300nm deposition, please contact Gabe Catalano <gcatalano@stanford.edu> in advance
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
nSiL: Cleanroom
NEMO ID:
aja2-evap
Training and Maintenance
Lab Facility:
Training Charges:
1.00 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Check the NEMO Training Dashboard for upcoimng training sessions (login required).
Notes:
One shadowing session and a training with tool owner are required. Training sessions are held 3pm Weds; sign up through NEMO. Sessions limited to 5 attendees. Review the training calendar on NEMO, or contact the tool owner when confirming the date.
