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Neel Mehta

Contact Information

Phone:

(650)736-9358

Office:

Paul G. Allen 144

Email:

nmehta26@stanford.edu

About

Role:

Process Engineer for Furnaces

Trainer for

AMAT Centurion Epitaxial System (epi2)

CHA Solutions II Evaporator (cha-evap)

First Nano carbon nanotube CVD furnace (cvd-nanotube)

Intlvac Evaporator (Intlvac_evap)

Tystar Bank 1 Tube 1 Anneal (B1T1 Flexible Oxide)

Tystar Bank 1 Tube 2 (B1T2 Flexible Oxide)

Tystar Bank 1 Tube 3 Poly (B1T3 Flexible Poly)

Tystar Bank 1 Tube 4 LTO (B1T4 Flexible LTO)

Tystar Bank 2 Tube 5 (B2T5 Clean Anneal)

Tystar Bank 2 Tube 6 (B2T6 Clean Oxide)

Tystar Bank 2 Tube 7 Nitride (B2T7 Clean Nitride)

Tystar Bank 2 Tube 8 LTO (B2T8 Clean LTO)

Tystar Bank 3 Tube 10 Nitride (B3T10 Clean Nitride)

Tystar Bank 3 Tube 11 TEOS (B3T11 Clean TEOS)

Tystar Bank 3 Tube 12 Poly (B3T12 Clean Poly)

Tystar Bank 3 Tube 9 (B3T9 Clean Oxide)

Backup trainer for

AJA2 Evaporator (aja2-evap)

Prometrix Resistivity Mapping System (prometrix)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Backup maintenance for

CHA Solutions II Evaporator (cha-evap)

Tystar Bank 1 Tube 1 Anneal (B1T1 Flexible Oxide)

Tystar Bank 1 Tube 2 (B1T2 Flexible Oxide)

Tystar Bank 1 Tube 3 Poly (B1T3 Flexible Poly)

Tystar Bank 1 Tube 4 LTO (B1T4 Flexible LTO)

Tystar Bank 2 Tube 5 (B2T5 Clean Anneal)

Tystar Bank 2 Tube 6 (B2T6 Clean Oxide)

Tystar Bank 2 Tube 7 Nitride (B2T7 Clean Nitride)

Tystar Bank 2 Tube 8 LTO (B2T8 Clean LTO)

Tystar Bank 3 Tube 10 Nitride (B3T10 Clean Nitride)

Tystar Bank 3 Tube 11 TEOS (B3T11 Clean TEOS)

Tystar Bank 3 Tube 12 Poly (B3T12 Clean Poly)

Tystar Bank 3 Tube 9 (B3T9 Clean Oxide)