Tystar 4600 Mini is an atmospheric pressure furnace and offer processes such as:
Pyrogenic Oxidation Wet Oxidation
Atmospheric Dry Oxidation
TLC Dry Oxidation
Doping diffusion
N2, Ar, FGA Anneal
The reactions are typically of growth type and occur at atmospheric pressure and high temperatures. The growth rate is dependent on temperature and time.
Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF