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Equipment Used:
Tystar Bank 1 Tube 2 (B1T2 Flexible Oxide Anneal)
Tystar Bank 2 Tube 5 (B2T5 Clean Oxide Anneal)
Tystar Bank 2 Tube 6 (B2T6 Clean Oxide)
Tystar Bank 3 Tube 9 (B3T9 Clean Oxide)
Tystar Bank 1 Tube 1 (B1T1 Flexible Oxide)
Tystar Atmoshperic Furnaces SOP
Source:
Tystar Atmoshperic Furnaces SOP
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