Tystar Bank 3 Tube 9 (B3T9 Clean Oxide)
Overview
Tystar 4600 Mini Bank 1Tube 2 is an atmospheric pressure furnace and offer processes such as:
- Pyrogenic Oxidation Wet Oxidation
- Atmospheric Dry Oxidation
- TLC Dry Oxidation
The reactions are typically of growth type and occur at atmospheric pressure and high temperatures. The growth rate is dependent on temperature and time.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Cleaning Required:
Pre-Diffusion Clean
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range:
400 °C - 1100 °C
Gases
Substrate Type
Substrate Sizes
Maximum Load:
100
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
SNF: Annealing, Oxidation and Doping
NEMO ID:
B3T9 Clean Oxide
Training and Maintenance
Lab Facility:
Training Charges:
2.00 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Contact the primary trainer: Neel Mehta
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Neel Mehta
Notes:
