Chemical Formula:
4% H2 in N2
| Equipment name & NEMO ID | Cleanliness | Location | Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
RTA AllWin 610 aw610_l |
SNF Paul G Allen L107 Cleanroom | |||
|
RTA AllWin 610 aw610_r |
SNF Paul G Allen L107 Cleanroom | |||
|
Tystar Bank 1 Tube 1 Anneal B1T1 Flexible Oxide |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 1 Tube 2 B1T2 Flexible Oxide |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 2 Tube 5 B2T5 Clean Anneal |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 2 Tube 6 B2T6 Clean Oxide |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 3 Tube 9 B3T9 Clean Oxide |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|