Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
AJA2 Evaporator aja2-evap |
Evaporator AJA2 Training | Flexible | SNF Paul G Allen L107 Cleanroom |
For more than 300nm deposition, please contact Gabe Catalano <gcatalano@stanford.edu> in advance |
|
Heidelberg MLA 150 - 2 heidelberg2 |
Heidelberg Training | "All" | SNF Paul G Allen L107 Cleanroom |
Direct Write |
|
Lesker2 Sputter lesker2-sputter |
Sputter Lesker 1&2 Training | Semiclean | SNF Paul G Allen L107 Cleanroom |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter |
|
Nanospec 3 nanospec3 |
Nanospec 3 Training | "All" | SNF Paul G Allen L107 Cleanroom | |
|
Sensofar S-neox s-neox |
Sensofar S-neox Training | "All" | SNF Paul G Allen L107 Cleanroom |
non contact 3D optical profiling |