Skip to content Skip to navigation

Nanospec 3 (nanospec3)


The Nanometrics Nanospec system uses non-contact, spectro-reflectometry (measurement of the intensity of reflective light as a function of incident wavelength) to determine the thickness of transparent films (up to two) on substrates, such as silicon, that are reflective in the visible range. Wavelength range is from 300nm-900nm.


Processing Technique(s)

Capabilities and Specifications

Lab Organization, Location, and NEMO Information

NEMO Area: 
nSiL: Cleanroom

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Contact the primary trainer: Cliff Knollenberg

Operating Instructions