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Gary Sosa
Contact Information
Phone:
(650)725-1685
Office:
Paul G. Allen 158
Email:
gsosa@stanford.edu
About
Role:
Maintenance Engineer - Litho
Lithography Area/Wet Benches/Characterization
Trainer for
Oriel Deep UV Exposure Lamp (oriel-duv)
Maintainer for
ASML PAS 5500/60 i-line Stepper (asml)
CytoViva HSI (cytoviva)
EVG 101 Spray Coater (evgspraycoat)
Ex Fab Develop Wet Bench (wbexfab_dev)
Ex Fab Solvent Wet Bench (wbexfab_solv)
Flexus 2320 Stress Tester (stresstest)
Headway 3 Manual Resist Spinner (headway3)
HMDS Vapor Prime Oven, YES2 (yes2)
Hummer V Sputter Coater (hummer)
Karl Suss MA-6 Contact Aligner (karlsuss)
Karl Suss MA-6 Contact Aligner (karlsuss2)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oriel Deep UV Exposure Lamp (oriel-duv)
Profilometer AlphaStep D-300 (alphastep2)
Prometrix Resistivity Mapping System (prometrix)
Reflectance Spectrometer Filmetrics F40 (filmetrics)
SEM -Zeiss Merlin (sem-merlin)
Sensofar S-neox (s-neox)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Woollam (woollam)
Backup maintenance for
DISCO Wafer Saw (DISCO wafersaw)
Headway Manual Resist Spinner (headway2)
HMDS Vapor Prime Oven, YES (yes)
Laurell Manual Resist Spinner (laurell-R)
Mask Scrubber (masksrub)
Optomec Printer (optomec-printer)
Oven (White) (white-oven)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Oven BlueM 200°C to 430°C (bluem)
Profilometer Alphastep 500 (alphastep)
Ultraviolet Photoresist Cure (uvcure)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Resist Strip (wbresstrip-1)
Wet Bench Solvent Lithography (lithosolv)
