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Gary Sosa

Contact Information

Phone:

(650)725-1685

Office:

Paul G. Allen 158

Email:

gsosa@stanford.edu

About

Role:

Maintenance Engineer - Litho

Lithography Area/Wet Benches/Characterization

Trainer for

Oriel Deep UV Exposure Lamp (oriel-duv)

Maintainer for

ASML PAS 5500/60 i-line Stepper (asml)

CytoViva HSI (cytoviva)

EVG 101 Spray Coater (evgspraycoat)

Ex Fab Develop Wet Bench (wbexfab_dev)

Ex Fab Solvent Wet Bench (wbexfab_solv)

Flexus 2320 Stress Tester (stresstest)

Headway 3 Manual Resist Spinner (headway3)

HMDS Vapor Prime Oven, YES2 (yes2)

Hummer V Sputter Coater (hummer)

Karl Suss MA-6 Contact Aligner (karlsuss)

Karl Suss MA-6 Contact Aligner (karlsuss2)

Nanospec 210XP (nanospec2)

Nanospec 3 (nanospec3)

Oriel Deep UV Exposure Lamp (oriel-duv)

Profilometer AlphaStep D-300 (alphastep2)

Prometrix Resistivity Mapping System (prometrix)

Reflectance Spectrometer Filmetrics F40 (filmetrics)

SEM -Zeiss Merlin (sem-merlin)

Sensofar S-neox (s-neox)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Woollam (woollam)

Backup maintenance for

DISCO Wafer Saw (DISCO wafersaw)

Headway Manual Resist Spinner (headway2)

HMDS Vapor Prime Oven, YES (yes)

Laurell Manual Resist Spinner (laurell-R)

Optomec Printer (optomec-printer)

Oven (White) (white-oven)

Oven 110°C post-bake (oven110)

Oven 90°C prebake (oven90)

Oven BlueM 200°C to 430°C (bluem)

Profilometer Alphastep 500 (alphastep)

Ultraviolet Photoresist Cure (uvcure)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Wet Bench CMOS Metal (wbclean3)

Wet Bench Decontamination (wbdecon)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

Wet Bench Miscellaneous (wbmiscres)

Wet Bench Resist Strip (wbresstrip-1)

Wet Bench Solvent Lithography (lithosolv)