Profilometer Alphastep 500 (alphastep)
Overview
The Tencor Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height. Step height measurements from 500 Angstroms to 300 µm.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Substrate Type
Substrate Sizes
Maximum Load:
1
Notes:
500Å to 300µm
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
nSiL: L104 Stinson
NEMO ID:
alphastep
Training and Maintenance
Lab Facility:
Training Charges:
0.25 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Uli Thumser
