Atomic Force Microscopy (AFM) |
Asylum AFM afm-asylum |
Atomic force microscopy.
|
Flexible |
SNF Exfab Paul G Allen 151 Ocean |
Microscopy |
Keyence Digital Microscope VHX-6000 keyence |
Microscopy
|
All |
SNF Exfab Paul G Allen 104 Stinson |
Step Profile |
Profilometer Alphastep 500 alphastep |
Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group.
|
Flexible |
SNF Exfab Paul G Allen 104 Stinson |
Step Profile |
Profilometer AlphaStep D-300 alphastep2 |
A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.
|
Flexible |
SNF Exfab Paul G Allen 104 Stinson |
Microscopy |
SEM -Zeiss Merlin sem-merlin |
Mid-Range SEM for inspection of wafer defects, etch depths, and lithography overlay.
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All |
SNF Exfab Paul G Allen 104 Stinson |
Optical Profilometer, Interferometry |
Sensofar S-neox s-neox |
3D optical profiler combining confocal, interferometry, and focus variation techniques to measure the surface height of smooth to very rough, ideally reflecting surfaces.
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All |
SNF Cleanroom Paul G Allen L107 |
Step Profile |
Tencor P2 Profilometer p2 |
Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group.
|
Clean, Semiclean |
SNF Cleanroom Paul G Allen L107 |