Interferometry

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	3D optical profiler combining confocal, interferometry, and focus variation techniques to measure the surface height of smooth to very rough, ideally reflecting surfaces.	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	All	Pieces 2" 3" 4" 6" 8"	1	non contact 3D optical profiling