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Profilometer

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Atomic Force Microscopy (AFM)	Asylum AFM afm-asylum	Atomic force microscopy.	Flexible	SNF Exfab Paul G Allen 151 Ocean
Step Profile	Profilometer Alphastep 500 alphastep	Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Profilometer AlphaStep D-300 alphastep2	A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	3D optical profiler combining confocal, interferometry, and focus variation techniques to measure the surface height of smooth to very rough, ideally reflecting surfaces.	All	SNF Cleanroom Paul G Allen L107
Step Profile	Tencor P2 Profilometer p2	Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group.	Clean, Semiclean	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes
Atomic Force Microscopy (AFM)	Asylum AFM afm-asylum	Flexible	Pieces 2" 3"
Step Profile	Profilometer Alphastep 500 alphastep	Flexible	Pieces 2" 3" 4" 6"	1	500Å to 300µm
Step Profile	Profilometer AlphaStep D-300 alphastep2	Flexible	Pieces 2" 3" 4" 6"	1
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	All	Pieces 2" 3" 4" 6" 8"	1	non contact 3D optical profiling
Step Profile	Tencor P2 Profilometer p2	Clean, Semiclean	Pieces 2" 3" 4" 6" 8"	1	Step height measurement range 500 Å to 80 µm