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Profilometer

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Atomic Force Microscopy (AFM)	AFM Bruker Dimension ICON	afm		SNSF X-ray & Surface Analysis Shriram Shriram 99
Atomic Force Microscopy (AFM)	Asylum AFM afm-asylum	Atomic force microscopy.	Flexible	SNF Exfab Paul G Allen 151 Ocean
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC	Surface profiler measures step heights as small as 10nm. Stylus tip radius is 12.5 microns.		SNSF NPC Cleanroom Spilker suite006
Step Profile	Profilometer Alphastep 500 alphastep	Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Profilometer AlphaStep D-300 alphastep2	A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	3D optical profiler combining confocal, interferometry, and focus variation techniques to measure the surface height of smooth to very rough, ideally reflecting surfaces.	All	SNF Cleanroom Paul G Allen L107
Step Profile	Tencor P2 Profilometer p2	Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group. Pieces to 8 inch wafers. Stepheight 500 Å to 80µm. Scan length 0.01 mm to 210 mm. Stylus tip radius is 12.5 µm.	Clean, Semiclean	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes	Stylus Tip Radius
Atomic Force Microscopy (AFM)	AFM Bruker Dimension ICON
Atomic Force Microscopy (AFM)	Asylum AFM afm-asylum	Flexible	Pieces 2" 3"
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC			1		12.5 µm
Step Profile	Profilometer Alphastep 500 alphastep	Flexible	Pieces 2" 3" 4" 6"	1	500Å to 300µm	5 µm
Step Profile	Profilometer AlphaStep D-300 alphastep2	Flexible	Pieces 2" 3" 4" 6"	1		2 µm
Optical Profilometer, Interferometry	Sensofar S-neox s-neox	All	Pieces 2" 3" 4" 6" 8"	1	non contact 3D optical profiling
Step Profile	Tencor P2 Profilometer p2	Clean, Semiclean	Pieces 2" 3" 4" 6" 8"	1	Step height measurement range 500 Å to 80 µm	12.5 µm