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Step Profile

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC	Surface profiler measures step heights as small as 10nm. Stylus tip radius is 12.5 microns.		SNSF NPC Spilker suite 6
Step Profile	Profilometer Alphastep 500 alphastep	Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Profilometer AlphaStep D-300 alphastep2	A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Tencor P2 Profilometer p2	Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group. Pieces to 8 inch wafers. Stepheight 500 Å to 80µm. Scan length 0.01 mm to 210 mm. Stylus tip radius is 12.5 µm.	Clean, Semiclean	SNF Paul G Allen L107 Cleanroom

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes	Stylus Tip Radius
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC			1		12.5 µm
Step Profile	Profilometer Alphastep 500 alphastep	Flexible	Pieces 2" 3" 4" 6"	1	500Å to 300µm	5 µm
Step Profile	Profilometer AlphaStep D-300 alphastep2	Flexible	Pieces 2" 3" 4" 6"	1		2 µm
Step Profile	Tencor P2 Profilometer p2	Clean, Semiclean	Pieces 2" 3" 4" 6" 8"	1	Step height measurement range 500 Å to 80 µm	12.5 µm