Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group.
A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.
Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group.
500Å to 300µm
Step height measurement range 500 Å to 80 µm
