Overview

The KLA AlphaStep D-300 is a stylus-based (tip radius 2 microns) surface profiler to measure step heights on surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height. Step height measurements from 50 nm to 300 µm.

 

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Substrate Sizes

Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Maximum Load: 
1

Lab Organization, Location, and NEMO Information

Lab Organization: 

SNF Exfab

Location: 
SNF Exfab Paul G Allen L104 Stinson
NEMO Area: 
ExFab: L104 Stinson
NEMO ID: 
alphastep2

Training and Maintenance

Lab Facility: 
SNF Exfab
Training Charges: 
0.25 hours
Primary Trainer: 
Cliff Knollenberg
Backup Trainer(s): 
Rachelle Salmani
Uli Thumser
Primary Maintenance: 
Gary Sosa

Steps to become a tool user

  1. Become a member of nano@stanford.

  2. Become a member of SNF.

  3. Watch the 12 minute on-line training video located at: https://www.youtube.com/watch?v=U1eDc-Pw_ys  (Many thanks to Tom Carver of the Flexible Cleanroom).

  4. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF

  5. Contact the primary trainer: Cliff Knollenberg