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Characterization (link to Processing Techniques)
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Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
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Uli Thumser
Contact Information
Phone:
(650)725-3694
Office:
Paul G. Allen 143
Email:
uthumser@stanford.edu
About
Role:
Process Engineer - Benches/Litho
Uli is the wet bench lady who keeps everyone safe while using wet chemicals.
Trainer for
Critical Point Dryer Tousimis Automegasamdri-915B (cpd)
Karl Suss MA-6 Contact Aligner (karlsuss)
Karl Suss MA-6 Contact Aligner (karlsuss2)
Mask Scrubber (masksrub)
Profilometer Alphastep 500 (alphastep)
Profilometer AlphaStep D-300 (alphastep2)
Prometrix Resistivity Mapping System (prometrix)
Sensofar S-neox (s-neox)
SPTS uetch vapor etch (uetch)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Resist Strip (wbresstrip-1)
Backup trainer for
Ex Fab Develop Wet Bench (wbexfab_dev)
Flexus 2320 Stress Tester (stresstest)
Gasonics Aura Asher (gasonics)
HMDS Vapor Prime Oven, YES (yes)
HMDS Vapor Prime Oven, YES2 (yes2)
Matrix Plasma Resist Strip (matrix)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oven (White) (white-oven)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Solvent Lithography (lithosolv)
Xactix Xenon Difluoride Etcher (xactix)