HMDS Vapor Prime Oven, YES2 (yes2)
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lithography Specifications
Developer:
Process Temperature Range:
150 ºC
Maximum Load:
25
Notes:
Singe and prime. No Resist allowed!
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
nSiL: L104 Stinson
NEMO ID:
yes2
Training and Maintenance
Lab Facility:
Training Charges:
0.00 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
- Contact the primary trainer: Swaroop Kommera
