Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Process Temperature Range:
150 ºC
Lithography Specifications
Developer:
Maximum Load:
25
Notes:
Singe and prime. No Resist allowed!
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
NEMO ID:
yes2
Training and Maintenance
Lab Facility:
Training Charges:
0.00 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
"All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
- Contact the primary trainer: Swaroop Kommera