Cliff Knollenberg

Contact Information

Phone:

(650)721-1274

Office location (building & room #):

Paul G. Allen 136

Email:

cknollen@stanford.edu

About

Title:

Process Engineer for Litho

Liaison Specialties:

Etching

MEMS

Optics

Process integration

Trainer for

ASML PAS 5500/60 i-line Stepper (asml)

EVG 101 Spray Coater (evgspraycoat)

Ex Fab Develop Wet Bench (wbexfab_dev)

Flexus 2320 Stress Tester (stresstest)

Headway Manual Resist Spinner (headway2)

HMDS Vapor Prime Oven, YES (yes)

Hummer V Sputter Coater (hummer)

Nanospec 3 (nanospec3)

Oven (White) (white-oven)

Oven 110°C post-bake (oven110)

Oven 90°C prebake (oven90)

Oven BlueM 200°C to 430°C (bluem)

Profilometer AlphaStep D-300 (alphastep2)

SEM -Zeiss Merlin (sem-merlin)

Ultraviolet Photoresist Cure (uvcure)

Backup trainer for

Ex Fab Solvent Wet Bench (wbexfab_solv)

Headway 3 Manual Resist Spinner (headway3)

HMDS Vapor Prime Oven, YES2 (yes2)

Karl Suss MA-6 Contact Aligner (karlsuss)

Karl Suss MA-6 Contact Aligner (karlsuss2)

Laurell Manual Resist Spinner (laurell-R)

Nanospec 210XP (nanospec2)

Profilometer Alphastep 500 (alphastep)

Prometrix Resistivity Mapping System (prometrix)

Reflectance Spectrometer Filmetrics F40 (filmetrics)

Sensofar S-neox (s-neox)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Wet Bench Miscellaneous (wbmiscres)

Wet Bench Solvent Lithography (lithosolv)