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Face shield cleaning using steamer
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Characterization (link to Processing Techniques)
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Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
People
Staff List
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Technical Liaisons
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Cliff Knollenberg
Contact Information
Phone:
(650)721-1274
Office:
Paul G. Allen 136
Email:
cknollen@stanford.edu
About
Role:
Process Engineer for Litho
Technical Liaison for:
Etching, MEMS, Optics, Process integration
Trainer for
ASML PAS 5500/60 i-line Stepper (asml)
EVG 101 Spray Coater (evgspraycoat)
EVG Contact Aligner (evalign)
Flexus 2320 Stress Tester (stresstest)
Headway Manual Resist Spinner (headway2)
HMDS Vapor Prime Oven, YES (yes)
Nanospec 3 (nanospec3)
Oven (White) (white-oven)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Oven BlueM 200°C to 430°C (bluem)
SEM -Zeiss Merlin (sem-merlin)
Ultraviolet Photoresist Cure (uvcure)
Backup trainer for
Ex Fab Develop Wet Bench (wbexfab_dev)
Ex Fab Solvent Wet Bench (wbexfab_solv)
Headway 3 Manual Resist Spinner (headway3)
HMDS Vapor Prime Oven, YES2 (yes2)
Karl Suss MA-6 Contact Aligner (karlsuss)
Karl Suss MA-6 Contact Aligner (karlsuss2)
Laurell Manual Resist Spinner (laurell-R)
Mask Scrubber (masksrub)
Nanospec 210XP (nanospec2)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Oxford Plasma Pro ICP-RIE (Ox-gen)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
Profilometer Alphastep 500 (alphastep)
Profilometer AlphaStep D-300 (alphastep2)
Prometrix Resistivity Mapping System (prometrix)
Reflectance Spectrometer Filmetrics F40 (filmetrics)
Samco PC300 Plasma Etch System (samco)
Sensofar S-neox (s-neox)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Solvent Lithography (lithosolv)
