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Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Equipment
Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Operating Instructions
Laurell Manual Resist Spinner - R
Related Documentation
PROM Request(s)
Introduction of EBR PG Wash Bottle for litho solvent bench
Spin coat substrates with graphene
Use of InP and ZnS Quantum Dots in Toluene in laurell-g
Use of polystyrene suspension in Laurell Manual Resist Spinner
Use of TFB and m-xylene in laurell-g
Laurell Manual Resist Spinner (laurell-R)
Cleanliness:
All
Processing Technique(s)
Photolithography
>
Resist coat
>
Resist Coat (manual)
Capabilities and Specifications
Lithography Specifications
Resist:
Resists
SU-8
Lift Off Layer
Chemicals
PMMA
Substrate Sizes
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Notes:
SU-8, LOL, Ebeam resists allowed. No Acetone allowed.
Lab Organization, Location, and NEMO Information
Lab Organization:
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location:
SNF Cleanroom Paul G Allen L107
NEMO Area:
SNF: Photolithography
NEMO ID:
laurell-R
Training and Maintenance
Lab Facility:
SNF Cleanroom
Training Charges:
1.00 hours
Primary Trainer:
Michael Robles
Backup Trainer(s):
Cliff Knollenberg
Swaroop Kommera
Primary Maintenance:
Mario Vilanova
Backup Maintenance:
Gary Sosa
Steps to become a tool user
Become a
member of SNF
.
"All Litho" class is required before training on any of the lithography tools. Please send an email to
all-litho-training@lists.stanford.edu
to sign up for the All Litho class. Read more here:
All Litho class
.
Study the relevant operating procedures:
Laurell Manual Resist Spinner - R
Contact the primary trainer:
Michael Robles
Operating Instructions
Laurell Manual Resist Spinner - R