Preferred Short Name:
LOL
LOL is a resist-like layer that can be spin coated prior to resist coating to enable a bi-layer liftoff process that can address profile concerns.
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Laurell Manual Resist Spinner laurell-R |
Laurell Manual Resist Spinner Training 1.00 hours |
SNF Paul G Allen L107 Cleanroom |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed. |