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Resist Coat (manual)

Manual spin coating is used in cases that are not covered under "standard" condiitions. Often this is used to experiment with new resists and/or materials. PROM approval is required for new material introduction.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Resist Coat (manual)	Headway 3 Manual Resist Spinner headway3		All	SNF Exfab Paul G Allen 104 Stinson
Resist Coat (manual)	Headway Manual Resist Spinner headway2		All	SNF Cleanroom Paul G Allen L107
Resist Coat (manual)	Laurell Manual Resist Spinner laurell-R		All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Chemicals	Substrate Size	Maximum Load (number of wafers)	Resist	Notes
Resist Coat (manual)	Headway 3 Manual Resist Spinner headway3	All		Pieces 2" 3" 4"	1 piece or wafer	Resists Shipley 3612 resist SPR220-3 resist SPR220-7
Resist Coat (manual)	Headway Manual Resist Spinner headway2	All		Pieces 2" 3" 4" 6"	one piece or wafer	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist SPR220-3 resist SPR220-7 (C₅O₂H₈)_n	Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists
Resist Coat (manual)	Laurell Manual Resist Spinner laurell-R	All	(C₅O₂H₈)_n	Pieces 2" 3" 4" 6"		Resists SU-8 LOL	SU-8, LOL, Ebeam resists allowed. No Acetone allowed.