Manual spin coating is used in cases that are not covered under "standard" condiitions. Often this is used to experiment with new resists and/or materials. PROM approval is required for new material introduction.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Resist Coat (manual) |
Headway 3 Manual Resist Spinner headway3 |
"All" | SNF Exfab Paul G Allen 104 Stinson | |
| Resist Coat (manual) |
Headway Manual Resist Spinner headway2 |
"All" | SNF Paul G Allen L107 Cleanroom | |
| Resist Coat (manual) |
Laurell Manual Resist Spinner laurell-R |
"All" | SNF Paul G Allen L107 Cleanroom |