Manual spin coating is used in cases that are not covered under "standard" condiitions. Often this is used to experiment with new resists and/or materials. PROM approval is required for new material introduction.

Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Location
Resist Coat (manual) Headway 3 Manual Resist Spinner
headway3
"All" SNF Exfab Paul G Allen 104 Stinson
Resist Coat (manual) Headway Manual Resist Spinner
headway2
"All" SNF Paul G Allen L107 Cleanroom
Resist Coat (manual) Laurell Manual Resist Spinner
laurell-R
"All" SNF Paul G Allen L107 Cleanroom