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Resist coat

Coating is the term used to cover the substrate (wafer or piece) with a UV light sensitive film that is used to pattern the surface of the material. Spin coating is the most popular method.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Resist Spray Coat (manual)	EVG 101 Spray Coater evgspraycoat		All	SNF Cleanroom Paul G Allen L107
Resist Coat (manual)	Headway 3 Manual Resist Spinner headway3		All	SNF Exfab Paul G Allen 104 Stinson
Resist Coat (manual)	Headway Manual Resist Spinner headway2		All	SNF Cleanroom Paul G Allen L107
Resist Coat (manual)	Laurell Manual Resist Spinner laurell-R		All	SNF Cleanroom Paul G Allen L107
Resist Coat (automatic)	SVG Resist Coat Track 1 svgcoat	Resist coater and bake (automatic) for 4 inch wafers.	All	SNF Cleanroom Paul G Allen L107
Resist Coat (automatic)	SVG Resist Coat Track 2 svgcoat2	Resist coater and bake (automatic) for 4 inch wafers.	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Chemicals	Substrate Size	Maximum Load (number of wafers)	Resist	Notes
Resist Spray Coat (manual)	EVG 101 Spray Coater evgspraycoat	All		Pieces 2" 3" 4" 6"	1	Resists	Spray coating of resists
Resist Coat (manual)	Headway 3 Manual Resist Spinner headway3	All		Pieces 2" 3" 4"	1 piece or wafer	Resists Shipley 3612 resist SPR220-3 resist SPR220-7
Resist Coat (manual)	Headway Manual Resist Spinner headway2	All		Pieces 2" 3" 4" 6"	one piece or wafer	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist SPR220-3 resist SPR220-7 (C₅O₂H₈)_n	Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists
Resist Coat (manual)	Laurell Manual Resist Spinner laurell-R	All	(C₅O₂H₈)_n	Pieces 2" 3" 4" 6"		Resists SU-8 LOL	SU-8, LOL, Ebeam resists allowed. No Acetone allowed.
Resist Coat (automatic)	SVG Resist Coat Track 1 svgcoat	All		4"	25 4 inch wafers	Shipley 3612 resist SPR220-3 resist SPR220-7	Automatic Resist spinning and bake
Resist Coat (automatic)	SVG Resist Coat Track 2 svgcoat2	All		4"	25 4 inch wafers	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist	Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal.