There is automated equipment available for dispensing resists under "standard" conditions.
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Resist Coat (automatic) |
SVG Resist Coat Track 1 svgcoat |
Resist coater and bake (automatic) for 4 inch wafers.
|
"All" | SNF Paul G Allen L107 Cleanroom |
| Resist Coat (automatic) |
SVG Resist Coat Track 2 svgcoat2 |
Resist coater and bake (automatic) for 4 inch wafers. |
"All" | SNF Paul G Allen L107 Cleanroom |