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Resist Coat (automatic)

There is automated equipment available for dispensing resists under "standard" conditions.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Resist Coat (automatic)	SVG Resist Coat Track 1 svgcoat	Resist coater and bake (automatic) for 4 inch wafers.	All	SNF Cleanroom Paul G Allen L107
Resist Coat (automatic)	SVG Resist Coat Track 2 svgcoat2	Resist coater and bake (automatic) for 4 inch wafers.	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Resist	Notes
Resist Coat (automatic)	SVG Resist Coat Track 1 svgcoat	All	4"	25 4 inch wafers	Shipley 3612 resist SPR220-3 resist SPR220-7	Automatic Resist spinning and bake
Resist Coat (automatic)	SVG Resist Coat Track 2 svgcoat2	All	4"	25 4 inch wafers	AZ5214IR Shipley 3612 resist SPR 955 CM-.7 resist	Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal.