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Reflectance Spectrometer Filmetrics F40 (filmetrics)

Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Maximum Load: 
one piece or wafer

Lab Organization, Location, and NEMO Information

Lab Organization: 
Stanford Nanofabrication Facility (SNF)
Location: 
SNF Cleanroom Paul G Allen L107
NEMO Area: 
SNF: Characterization and Testing
NEMO ID: 
filmetrics

Training and Maintenance

Lab Facility: 
SNF
Primary Trainer: 
Swaroop Kommera
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Gary Sosa
Backup Maintenance: 
Mario Vilanova

Steps to become a tool user

  1. Become a member of SNF.
  1. Contact the primary trainer: Swaroop Kommera

Operating Instructions

Filmetrics