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Ultraviolet Photoresist Cure (uvcure)


primary wavelength: 254 nm


Processing Technique(s)

Capabilities and Specifications

Lithography Specifications

Exposure Wavelength: 
254 nm

Lab Organization, Location, and NEMO Information

NEMO Area: 
SNF: Photolithography

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: Cliff Knollenberg