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Wet Bench Resist Strip (wbresstrip-1)

Capabilities and Specifications

Process Temperature Range: 
20 °C - 60 °C
Maximum Load: 
25 4 inch wafers
Notes: 

Wet Resist Removal: SRS-100 or PRS1000

Lab Organization, Location, and NEMO Information

NEMO Area: 
SNF: Wet Benches
NEMO ID: 
wbresstrip-1

Training and Maintenance

Lab Facility: 
Training Charges: 
0.75 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  2. Contact the primary trainer: Uli Thumser