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Poly(4-tert-butylstyrene) spin coating in SNF
PROM Request Title:
Poly(4-tert-butylstyrene) spin coating in SNF
PROM Request Summary:
Bring in new chemistry to use with SNF spin coating.
PROM Date:
06/06/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Poly(4-tert-butylstyrene) spin coating in SNF
Equipment List:
Headway Manual Resist Spinner (headway2)
Profilometer Alphastep 500 (alphastep)