HgCdTe/HgTe/HgCdTe quantum wells on GaAs substrate
PROM Request Title:
HgCdTe/HgTe/HgCdTe quantum wells on GaAs substrate
PROM Request Summary:
Request to do low temp Al2O3 deposition on new materials in Savannah. Pieces will be on carrier wafers.
PROM Date:
08/17/2015
PROM Decision:
Request approved. Chamber to be coated with 200 cycles of Al2O3 at 200C after deposition.
Link to PROM Request and supporting documentation:
Equipment List:
