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Characterizing ALD HfO2 roughness based on different deposition conditions

Project Type: 
Community Service
Date: 
September 2019
Report(s): 
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
Final Report: Characterizing ALD HfO2 roughness based on different deposition conditions
Processing Technique (former Function and Method): 
Thermal ALD
List of Important Equipment: 
Savannah ALD (savannah)