Atomic Layer Deposition of Zinc Oxide

Project Type:

E241

Date:

December 2014 (all day)

Areas of Interest:

ALD ZnO deposition

Report:

Atomic Layer Deposition of Zinc Oxide- Final Report

Processing Technique (former Function and Method):

Atomic Layer Deposition (ALD)

Researchers and (Mentors):

Pranav Ramesh, Jiheng Zhao, (J Provine), (Michelle Rincon)

List of Important Equipment:

Savannah ALD (savannah)

Presentation:

Atomic Layer Deposition of Zinc Oxide- Final Presentation