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Contamination Study of ZnO Anneal

PROM Request Title: 
Contamination Study of ZnO Anneal
PROM Request Summary: 
Request to collect data to determine impact of ZnO anneal in furnaces.
PROM Date: 
11/18/2014
PROM Decision: 
Approved. Data will be updated once results are back.
Link to PROM Request and supporting documentation: 
Contamination Study of ZnO Anneal
Equipment List: 
Savannah ALD (savannah)