Project Type: 
E241
Date: 
June 2015 (all day)
Areas of Interest: 
Process development for polyimide MLD, Savannah thermal management understanding
Report: 
Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide- Final Report
Processing Technique (former Function and Method): 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Tim English, (J Provine), (Michelle Rincon)
List of Important Equipment: 
MVD (mvd)
Savannah ALD (savannah)
Presentation: 
Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide- Final Presentation